High-pressure deflection behavior of las
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Emrah Simsek; Ben Pecholt; Charles Everson; Pal Molian
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Article
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2010
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Elsevier Science
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English
⚖ 754 KB
Single crystalline silicon carbide (SiC) in bulk or thin film form has the potential to be a durable and reliable MEMS pressure sensor in high-temperature and harsh chemical environments. Laser micromachining can fabricate SiC diaphragms for pressure sensors much faster than electrochemical etching,