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Mechanical and tribological properties of TiN and SiCN nanocomposite coatings deposited using methyltrichlorosilane

✍ Scribed by V. I. Ivashchenko; O. K. Porada; L. A. Ivashchenko; I. I. Timofeeva; S. M. Dub; P. L. Skrinskii


Publisher
Springer
Year
2008
Tongue
English
Weight
112 KB
Volume
47
Category
Article
ISSN
1573-9066

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