Mechanical and tribological properties of PVD and PACVD wear resistant coatings
โ Scribed by H Meerkamm; W Fruth; T Krumpiegl; C Schaufler
- Book ID
- 114199032
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 578 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0263-4368
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๐ SIMILAR VOLUMES
Plasma-assisted chemical vapour deposition (PACVD) siloxane coatings from a mixture of hexamethyldisiloxane (HMDSO) and O 2 , and hybrid coatings deposited by simultaneous sputtering of silicon and plasma polymerisation of HMDSO + O 2 were prepared on glass and steel substrates. The effect of the ad
## ลฝ . ลฝ . By combining thin layers of PVD titanium nitride TiN with thin layers preferably less than 10 nm of another nitride, e.g., niobium ลฝ . ลฝ . nitride NbN or aluminum nitride AlN , into a lamellae structure, a coating with superior properties to the homogenous coatings made from the constit