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Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas

✍ Scribed by V. Kulikovsky; V. Vorlicek; R. Ctvrtlik; P. Bohac; J. Suchanek; O. Blahova; L. Jastrabik


Book ID
108278735
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
496 KB
Volume
205
Category
Article
ISSN
0257-8972

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