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Measuring the thickness of opaque plane-parallel parts using an external cavity diode laser and a double-ended interferometer

✍ Scribed by Sheng-Hua Lu; Ching-I Chiueh; Cheng-Chung Lee


Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
149 KB
Volume
226
Category
Article
ISSN
0030-4018

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