Measuring the optical parameters of thin films by p-polarized laser beams

✍ Scribed by Xiaolin Liu; Peihui Liang; Weiqing Zhang; Yongxing Tang

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 431 KB
• Volume: 30
• Category: Article
• ISSN: 0030-3992
• DOI: 10.1016/s0030-3992(98)00012-7

✦ Synopsis

The refractive index n f , extinction coecient k f and thickness d f of a dip coated ®lm are measured by using p-polarized laser beams. A sample is oblique illuminated with a p-polarized laser beam, and then two re¯ected beams, from the front and back surfaces, are received with a detector. After measuring their intensity ratio versus the angle of incidence, it is convenient to obtain the parameters of the ®lm by means of data ®tting. The ®lms of polymethyltriethoxy silane (PMTES), which were made on a BK-7 glass substrate by dip coating, were measured. The method is non-contact, non-destructive and has the advantages of simplicity of both equipment and understanding. It is also shown that the values measured by this method are coincident with those measured by ellipsometry.