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Measuring cell type IÉ-10A for investigating solid dielectrics

✍ Scribed by I. N. Krotkov; M. D. Klionskii; Yu. P. Pustovit


Book ID
112413578
Publisher
Springer US
Year
1974
Tongue
English
Weight
308 KB
Volume
17
Category
Article
ISSN
0543-1972

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New SEM-Auger microanalyzer with U HV capability. (USA) The design and performance of a new Auger microanalyzer (EMAS) with the capability of UHV scanning electron microscope (SEM) is described. The incident electron beam is focused by a magnetic lens system, and the spatial resolution is below 0.5