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Measurements on MIS structures at infrasonic frequencies

✍ Scribed by Nakhmanson, R. S. ;Erkov, V. G.


Book ID
105361602
Publisher
John Wiley and Sons
Year
1970
Tongue
English
Weight
479 KB
Volume
2
Category
Article
ISSN
0031-8965

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It is well known that capacitance-voltage (C2V) measurements provide a simple determination of oxide thickness, but with the scaling down of components the classical method is not appropriated any more. We have observed that for two devices with the same oxide thickness and different surfaces, the c