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Measurements of the statistical characteristics of the turbulence of an optical system with hybrid fiber-optic sensor

✍ Scribed by O. V. Biryukova; V. I. Smirnov


Publisher
Springer US
Year
2006
Tongue
English
Weight
188 KB
Volume
49
Category
Article
ISSN
0543-1972

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For the assembly of hybrid microsystems a high accuracy in the range of a few micrometers is required. The combination of a parallel robot with an integrated 3D vision sensor uses positioning marks on the objects for object recognition. Within the assembly process, relative positioning accuracies in