Measurements of substrate carrier lifetimes in silicon-on-insulator wafers by a contactless dual-beam optical modulation technique

✍ Scribed by Ping-Chang Yang; Sheng S. Li

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 478 KB
• Volume: 35
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(92)90320-c