Measurements of spatial and temporal sheath evolution for spherical and cylindrical geometries in plasma source ion implantation

✍ Scribed by Shamim, M.; Scheuer, J. T.; Conrad, John R.

• Book ID: 126181145
• Publisher: American Institute of Physics
• Year: 1991
• Tongue: English
• Weight: 733 KB
• Volume: 69
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.348600