✦ LIBER ✦
Measurements of particle size kinetics from nanometer to micrometer scale in a low-pressure argon-silane radio-frequency discharge
✍ Scribed by Boufendi, L.; Plain, A.; Blondeau, J. Ph.; Bouchoule, A.; Laure, C.; Toogood, M.
- Book ID
- 121076865
- Publisher
- American Institute of Physics
- Year
- 1992
- Tongue
- English
- Weight
- 650 KB
- Volume
- 60
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.106981
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