Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

✍ Scribed by Ji-jun Xiong, Shi-jun Zheng, Ying-ping Hong…

• Book ID: 120948577
• Publisher: SP Zhejiang University Press
• Year: 2013
• Tongue: English
• Weight: 662 KB
• Volume: 14
• Category: Article
• ISSN: 1869-1951
• DOI: 10.1631/jzus.C12MNT04