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Measurement of trace phosphorus in dichlorosilane by high-temperature hydrogen reduction gas chromatography

✍ Scribed by Wen Ruimei; Liang Junwu; Zhou Shujun; Zhau Zhenhuan

Book ID: 108339856
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 284 KB
Volume: 757
Category: Article
ISSN: 1873-3778
DOI: 10.1016/s0021-9673(96)00653-x

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