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Measurement of the thickness and refractive indices of multiple layers by a confocal interference microscope using a low coherence source

✍ Scribed by Taskashi Fukano; Ichirou Yamaguchi


Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
145 KB
Volume
29
Category
Article
ISSN
0030-3992

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✦ Synopsis


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