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Measurement of the thermal conductivity of nanometer scale thin films by thermoreflectance phenomenon

✍ Scribed by M. Kuwahara; O. Suzuki; Y. Yamakawa; N. Taketoshi; T. Yagi; P. Fons; T. Fukaya; J. Tominaga; T. Baba

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
448 KB
Volume
84
Category
Article
ISSN
0167-9317

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Thermal conductivity measurements of low
Thermal conductivity measurements of low-k films using thermoreflectance phenomenon
✍ M. Kuwahara; O. Suzuki; S. Takada; N. Hata; P. Fons; J. Tominaga πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 110 KB

The thermal conductivity of low-dielectric-constant (low-k) materials has been studied by a nano second thermoreflectance measurement system (Nano-TheMS). The Nano-TheMS, which utilizes thermoreflectance, can easily measure the thermal conductivity of thin film of nano-meter scale thickness. We have