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Measurement of the roughness parameters with the use of an interference microscope

✍ Scribed by N. N. Moiseev, I. Yu. Tselmina

Book ID: 118806063
Publisher: Springer US
Year: 2012
Tongue: English
Weight: 359 KB
Volume: 55
Category: Article
ISSN: 0543-1972
DOI: 10.1007/s11018-012-0087-8

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