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Measurement of the plasma and neutral gas flow velocities in a low-pressure hollow-cathode plasma jet sputtering system

✍ Scribed by Klusoň, J; Kudrna, P; Tichý, M


Book ID
120053748
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
384 KB
Volume
22
Category
Article
ISSN
0963-0252

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