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Measurement of surface roughness by speckle correlation

✍ Scribed by Kobayashi, Koichi


Book ID
120649412
Publisher
The International Society for Optical Engineering
Year
2004
Tongue
English
Weight
220 KB
Volume
43
Category
Article
ISSN
0091-3286

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This paper describes a speckle correlation technique for the determination of surface roughness, ranging from 1.6 to 50 m. Instead of moving the laser beam, the specimen is rotated to achieve angular speckle correlation (ASC) in the far-ΓΏeld plane. The technique is simple and requires minimum optica