Measurement of Sub-micrometer Features Based on The Topographic Contrast Using Reflection Confocal Microscopy

✍ Scribed by Lee, SeungWoo; Kang, DongKyun; Yoo, HongKi; Kim, TaeJoong; Gweon, Dae-Gab; Lee, Suk-Won; Kim, Kwang-Soo

• Book ID: 115400268
• Publisher: Korean Journal of Optics and Photonics
• Year: 2005
• Tongue: English
• Weight: 547 KB
• Volume: 9
• Category: Article
• ISSN: 1226-4776
• DOI: 10.3807/JOSK.2005.9.1.026