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Measurement of small amplitude vibrations by a focus error sensor

✍ Scribed by Toshinori Nakajima; Eiichi Sato; Ichirou Yamaguchi

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 146 KB
Volume: 24
Category: Article
ISSN: 0030-3992
DOI: 10.1016/0030-3992(92)90114-h

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