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Measurement of period difference in grating pair based on analysis of far-field intensity patterns

โœ Scribed by Chao Guo; Lijiang Zeng


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
307 KB
Volume
281
Category
Article
ISSN
0030-4018

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โœฆ Synopsis


We propose and demonstrate an experimental method for measuring the period difference in grating pair. The method uses the compensating relationship between line-density difference and the Littrow-angle difference of gratings. Far-field intensity patterns of 0th-and ร€1st-orders diffraction beams are monitored for alignment during the angle measurement. For a pair of $0.676 lm period gratings, the relative period difference was measured to be 798.4 ร‚ 10 ร€6 with a standard deviation of 2.0 ร‚ 10 ร€6 .


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