✦ LIBER ✦
Measurement of particle nucleation and growth in low pressure chemical vapor deposition systems with the particle beam mass spectrometer
✍ Scribed by P.J Ziemann; P Liu; S Nijhawan; D.B Kittelson; P.H McMurry; S.A Campbell
- Book ID
- 115950968
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 119 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0021-8502
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