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Measurement of nanomechanical resonant structures in single-crystal silicon

✍ Scribed by Carr, D. W.

Book ID: 121281702
Publisher: AVS (American Vacuum Society)
Year: 1998
Tongue: English
Weight: 462 KB
Volume: 16
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.590416

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