Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage

✍ Scribed by Wei Gao; Yoshikazu Arai; Atsushi Shibuya; Satoshi Kiyono; Chun Hong Park

• Book ID: 108252165
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 517 KB
• Volume: 30
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/j.precisioneng.2005.06.003