✦ LIBER ✦
Measurement of layer thickness of silicon epitaxial wafers: (USA)R J Walsh, Semiconductor Prod Solid State Technol, 7 (8), Aug 1964, 23–27
- Publisher
- Elsevier Science
- Year
- 1965
- Tongue
- English
- Weight
- 127 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0042-207X
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