Measurement of ion current distribution on a three-dimensional workpiece in the positive pulse bias PBII

✍ Scribed by T. Ikehata; K. Shioya; N.Y. Sato; K. Yukimura

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 229 KB
• Volume: 242
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.08.127