Measurement of hydroxyl radicals in wafer cleaning solutions irradiated with megasonic waves

✍ Scribed by Keswani, M.; Raghavan, S.; Govindarajan, R.; Brown, I.

• Book ID: 123247780
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 484 KB
• Volume: 118
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2013.12.028