Measurement of duty cycles of photoresist grating masks made on top of multilayer dielectric stacks

✍ Scribed by Li, Lifeng ;Zeng, Lijiang

• Book ID: 115352227
• Publisher: The Optical Society
• Year: 2005
• Tongue: English
• Weight: 328 KB
• Volume: 44
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.44.004494