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Measurement of Anisotropic Biaxial Stresses in Si 1- x Ge x /Si Mesa Structures by Oil-Immersion Raman Spectroscopy
✍ Scribed by Kosemura, Daisuke; Tomita, Motohiro; Usuda, Koji; Tezuka, Tsutomu; Ogura, Atsushi
- Book ID
- 120284014
- Publisher
- Institute of Pure and Applied Physics
- Year
- 2013
- Tongue
- English
- Weight
- 721 KB
- Volume
- 52
- Category
- Article
- ISSN
- 0021-4922
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