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MBE growth of silicon films on diamond substrates

✍ Scribed by V. Y. Karasev; V. D. Kryukov; M. G. Kuznetsov; S. M. Pintus; M. A. Lamin; O. P. Pchelyakov; L. V. Sokolov


Book ID
106523774
Publisher
Springer
Year
2005
Tongue
English
Weight
121 KB
Volume
34
Category
Article
ISSN
1063-7397

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## Abstract By optimizing seeding techniques and plasma parameters for deposition, nanocrystalline diamond (NCD) films were deposited on different sorts of substrates with varying parameters such as temperature and methane content. Results of this optimization process were analysed by SEM, XRD, Ram