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MBE growth of cubic AlN films on MgO substrate via cubic GaN buffer layer

โœ Scribed by Masahiro Kakuda; Kenzo Makino; Takashi Ishida; Shigeyuki Kuboya; Kentaro Onabe

Book ID
112182276
Publisher
John Wiley and Sons
Year
2012
Tongue
English
Weight
489 KB
Volume
9
Category
Article
ISSN
1862-6351

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## Abstract We present our recent results on the growth of cubic AlN (001) layers by plasma assisted molecular beam epitaxy (PAMBE) using freestanding 3Cโ€SiC (001) substrate. For highโ€quality cโ€AlN layers reflection highโ€electron energy diffraction (RHEED) patterns in all azimuths show RHEED patter