✦ LIBER ✦
Maximum boron doping concentrations without oxygen incorporation for silicon molecular beam epitaxy using HBO2 and B2O3 as dopant sources
✍ Scribed by T.L. Lin; R.W. Fathauer; P.J. Grunthaner
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 226 KB
- Volume
- 184
- Category
- Article
- ISSN
- 0040-6090
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