Materials Processing Using an Atmospheric Pressure, RF-Generated Plasma Source

✍ Scribed by G.S. Selwyn; H.W. Herrmann; J. Park; I. Henins

• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 430 KB
• Volume: 41
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/1521-3986(200111)41:6<610::aid-ctpp610>3.0.co;2-l