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Materials issues in the processing, the operation and the reliability of MEMS

✍ Scribed by A. Witvrouw; H.A.C. Tilmans; I. De Wolf

Book ID: 108207354
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 824 KB
Volume: 76
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.07.001

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