Materials characterization of WNxCy, WNx and WCx films for advanced barriers

✍ Scribed by H. Volders; Z. Tökei; H. Bender; B. Brijs; R. Caluwaerts; L. Carbonell; T. Conard; C. Drijbooms; A. Franquet; S. Garaud; I. Hoflijk; A. Moussa; F. Sinapi; Y. Travaly; D. Vanhaeren; G. Vereecke; C. Zhao; W.-M. Li; H. Sprey; A.M. Jonas

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 621 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.05.023