Materials Characterization in the Vacuum Ultraviolet with Variable Angle Spectroscopic Ellipsometry

✍ Scribed by Wagner, T. ;Hilfiker, J.N. ;Tiwald, T.E. ;Bungay, C.L. ;Zollner, S.

• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 421 KB
• Volume: 188
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(200112)188:4<1553::aid-pssa1553>3.0.co;2-a