Materials and Processes for MEMS-Based Infrared Microspectrometer Integrated on HgCdTe Detector

✍ Scribed by Antoszewski, J.; Winchester, K.J.; Nguyen, T.; Keating, A.J.; Silva, K.K.M.B.; Musca, C.A.; Dell, J.M.; Faraone, L.

• Book ID: 114570585
• Publisher: IEEE
• Year: 2008
• Tongue: English
• Weight: 766 KB
• Volume: 14
• Category: Article
• ISSN: 1077-260X
• DOI: 10.1109/jstqe.2008.919741