✦ LIBER ✦

Material requirements and design considerations for Si/SiGe heterojunction CMOS

✍ Scribed by S. Badcock; A. O’Neill

Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 135 KB
Volume: 28
Category: Article
ISSN: 0749-6036
DOI: 10.1006/spmi.2000.0935

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✦ Synopsis

Five vertical architecture options for SiGe/Si heterojunction CMOS devices are compared using technology computer-aided design. The benefit of using SiGe over conventional MOSFETs is set to increase for future technology generations. We investigate the impact of material degradation, to determine the minimum requirements needed for HMOS to offer real advantages over conventional CMOS.