Mass spectroscopy analysis during the deposition of a-SiC:H and a-C:H films produced by hot wire and hot wire plasma-assisted techniques

✍ Scribed by I Ferreira; V Silva; H Águas; E Fortunato; R Martins

• Book ID: 108417520
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 155 KB
• Volume: 184
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(01)00478-0