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Mass spectrometry as an ancillary tool in metallo-organic chemical vapour deposition studies

โœ Scribed by Giovanni Carta; Gilberto Rossetto; Linda Borella; Donata Favretto; Pietro Traldi

Publisher
John Wiley and Sons
Year
1997
Tongue
English
Weight
172 KB
Volume
11
Category
Article
ISSN
0951-4198

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โœฆ Synopsis

Mass spectrometry has been employed as a diagnostic tool to investigate the decomposition of the (methylcyclopentadienyl)allyl-platinum complexes used as precursors for metallo-organic chemical vapour deposition (MOCVD) of platinum film. Measurements were performed either under electron ionization or electrospray ionization conditions. Both techniques indicate the Pt-allyl bond as being the weakest and the high stability of the Pt-methylcyclopentadienyl cation. Under electrospray conditions easy formation of platinum clusters is observed; most of them still contain one or more methylcyclopentadienyl species, thus giving a possible explanation of the undesired carbon-containing species sometimes present in the MOCVD-generated platinum film.

๐Ÿ“œ SIMILAR VOLUMES

Mass spectrometry as an ancillary tool i
Mass spectrometry as an ancillary tool in metallo-organic chemical vapour deposition studies. The case of zirconium-cyclopentadienyl derivatives
โœ Simone Codato; Giovanni Carta; Gilberto Rossetto; Pierino Zanella; Anna Maria Gi ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 90 KB ๐Ÿ‘ 2 views

Mass spectrometry has been employed as a diagnostic tool to investigate the decomposition of some zirconium cyclopentadienyl derivatives, namely dimethyl zirconium bis(cyclopentadiene) [(C 5 H 5 ) 2 Zr(CH 3 ) 2 ] (1), dimethyl zirconium bis(methylcyclopentadiene) [(CH 3 C 5 H 4 ) 2 Zr(CH 3 ) 2 ] (2)