Mass spectrometric study of the pyrolysis of organometallic precursors usable in GaAs vapor phase epitaxy: The fluorine-containing derivatives (C6F5)3-nMenGaAsEt3

✍ Scribed by F. Mauray; A. El Hammadi

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 632 KB
• Volume: 91
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(88)90372-7