Mass spectrometric investigation of the thermal decomposition of various organosilicon compounds in SixC1-x(H) chemical vapour deposition

✍ Scribed by J.P. Gerault; R. Morancho; G. Constant; P. Mazerolles; G. Manuel

• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 800 KB
• Volume: 4
• Category: Article
• ISSN: 0165-2370
• DOI: 10.1016/0165-2370(82)80027-2