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Mass spectrometric investigation of gas switching in an InGaAsP MOVPE system

✍ Scribed by H. Haspeklo; U. König; M. Heyen; H. Jürgensen

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 354 KB
Volume: 77
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(86)90285-x

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