The relation between the deposition rate of the films and the velocity distribution in the flow field is investigated in detail. The thin SiN films are deposited on Si substrates by the infrared thermal chemical vapor deposition (CVD) at 600 ยฐC, flux ratio (NH3/Si2H6) of 50 and 800 and total pressur
โฆ LIBER โฆ
Mass spectral analysis of CVD processes
โ Scribed by Waqar Ahmed; Ejaz Ahmed
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 288 KB
- Volume
- 57
- Category
- Article
- ISSN
- 0257-8972
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
Analysis of reaction gases flow in CVD p
โ
Yoshichika Mizuno; Shin-ichiro Uekusa
๐
Article
๐
1995
๐
Elsevier Science
๐
English
โ 309 KB
Mass spectral analysis of medicinal pyra
โ
R. A. Locock; R. E. Moskalyk; L. G. Chatten; L. M. Lundy
๐
Article
๐
1974
๐
John Wiley and Sons
๐
English
โ 480 KB
Modelling and analysis of CVD processes
โ
H.W. Brinkman; G.Z. Cao; J. Meijerink; K.J. de Vries; A.J. Burggraaf
๐
Article
๐
1993
๐
Elsevier Science
๐
English
โ 543 KB
Hydrodynamic description of CVD processe
โ
G. Wahl
๐
Article
๐
1977
๐
Elsevier Science
๐
English
โ 725 KB
GLC-Mass spectral analysis of fungal met
โ
David B. Repke; Dale Thomas Leslie; Nicholas G. Kish
๐
Article
๐
1978
๐
John Wiley and Sons
๐
English
โ 393 KB
The mass spectral analysis of several hy
โ
Zaharie Moldovan; Ovidiu Garlea; Teodora Panea; Alina Pop; Daniela Zinveliu; Luc
๐
Article
๐
1998
๐
John Wiley and Sons
๐
English
โ 147 KB
๐ 2 views
The mass spectral analysis of 17 hydrazine derivatives of the type -2-(carboxypropionyl)-(nine compounds) and -2-(carboxyacryloyl)-(eight compounds) under electron impact is reported. The fragmentation has been rationalized from the exact mass measurements as well as the detection of metastable tran