Mask misalignment in photolithographic fabrication of resonance-domain diffractive elements

✍ Scribed by Markku Kuittinen; Jari Turunen

• Book ID: 108362842
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 397 KB
• Volume: 142
• Category: Article
• ISSN: 0030-4018
• DOI: 10.1016/s0030-4018(97)00325-8