Mask blank fabrication, pattern transfer, and mounting distortion simulations for the 8-in. format SCALPEL mask

✍ Scribed by G. Dicks; R. Engelstad; E. Lovell; J. Liddle

• Book ID: 114155273
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 372 KB
• Volume: 57-58
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(01)00461-0