✦ LIBER ✦
Marker studies of silicide formation, silicon self-diffusion and silicon epitaxy using radioactive silicon and Rutherford backscattering
✍ Scribed by R. Pretorius; C.L. Ramiller; M-A. Nicolet
- Publisher
- Elsevier Science
- Year
- 1978
- Weight
- 379 KB
- Volume
- 149
- Category
- Article
- ISSN
- 0029-554X
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