Manufacturing of XEUV mirrors with a sub-nanometer surface shape accuracy

✍ Scribed by N.I. Chkhalo; E.B. Kluenkov; A.E. Pestov; V.N. Polkovnikov; D.G. Raskin; N.N. Salashchenko; L.A. Suslov; M.N. Toropov

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 241 KB
• Volume: 603
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/j.nima.2008.12.160