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Manufacturing and structure investigation of TiN-Al2O3-multilayers

✍ Scribed by H.-D Bauer; B Arnold; K Bartsch; R Rennekamp; A Leonhardt


Book ID
117676168
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
659 KB
Volume
11
Category
Article
ISSN
0965-9773

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